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Chamber Performance Services provide world-class precision cleaning, technology-enhanced coating and refurbishment services on chamber process kits and components. With an extensive understanding of equipment and process technology, optimized cleaning methods ensure high quality chamber performance. Leading-edge analytical testing capabilities validate cleaning methods while clean parts are certified to conform to performance specifications. With Metron Chamber Performance Services technical expertise and globally located facilities, customers worldwide can extend the life of capital investments, improve yield and reduce costs throughout the lifecycle of critical manufacturing systems
- Guaranteed availability of process kits and process assurance
- Up to 30% cost of ownership improvement
- Proprietary precision cleaning and advanced coatings extend up time
- Analytical services validate part cleanliness to mitigate chamber performance issues such as particle introduction and other yield detractors
| Cleaning and Coating |
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World-class cleaning, technology-enhanced coating and refurbishment services
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| Analytical Test Services |
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Technically advanced analytical instrumentation, 17025 accredited laboratory
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| Total Kit Management |
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Reduce cost of ownership with technology-enhanced process kit management service
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